Polymer blend lithography for metal films: large-area patterning with over 1 billion holes/inch²

• Cheng Huang,
• Alexander Förste,
• Stefan Walheim and
• Thomas Schimmel

Beilstein J. Nanotechnol. 2015, 6, 1205–1211, doi:10.3762/bjnano.6.123

• statistically the same size as the holes in Figure 3a. In general, metal PBL is a good supplementary to the conventional lithographic methods for fabrication of structures in hundreds of nanometer or even sub-100 nanometer range in a versatile and up-scalable way. Localized surface plasmonic resonance of

• holes found in the (sub-)100 nm range (about 14%). Optical transmission due to localized surface plasmonic resonance (blue) of perforated aluminum films with two different hole size distributions (red). Top: smaller holes (PS/PMMA mass ratio 3:7) with a hole coverage area of 15.2%, bottom: larger holes

• Al templates were fabricated in this work by metal PBL. The wavelength-selective optical transmission spectra due to the localized surface plasmonic effect of the holes in perforated Al films were investigated and compared to the respective hole diameter histograms. Keywords: localized surface